We have studied the dependence of surface profile,post-etch composition,formation of polymer on the effect of ICP parameters(ICP power,gas ratio,chamber pressure) by using micro regional XPS and SEM(scanning electron microscopy).
文章将ICP刻蚀技术应用于刻蚀HgCdTe,使用微区X射线光电子光谱学(XPS)、扫描电子显微镜(SEM)等表面分析技术研究了ICP各工艺参数,包括ICP功率、气体成分与配比、腔体压力等对刻蚀表面形貌、刻蚀后表面成分、聚合物形成的影响。
Development of an electronic optometer based on SCM;
单片机电子视力计的研制
Clinical analysis on liposuction adopting electronic liposuction machine;
医用电子去脂机行抽脂术临床效果分析
Research on the development of automobile electronic information industry ——based on the theory of industry growth;
基于产业成长理论的中国汽车电子信息产业发展研究
Mixed proton-electron conductors for hydrogen permeation;
质子-电子混合导体透氢膜
Study of ion catch technology of electron microscopy in virus detection of patient s excrement;
离子扑捉电子显微镜技术检测患者粪便中病毒的方法
Teaching research on electric and electron speciality oriented art recruiting students;
面向文科招生的电气、电子专业教学研究