The instrument is based on a combination of blazed grating, air-lubricated hydrostatic slide guide and ruby probe and touch absolute measurement method, in which the way to control testing temperature and vibration is adopted to ensure the ultra-precision accuracy and high measurement repeatability.
提出了一种新型可以测量孔和轴直径的超精密测量仪，该超精密测径仪主要由炫耀光栅和气浮导轨及红宝石探头组成，采用接触式绝对测量方法。