This kind of mechanisms which can be folded and deployed highly has the characteristics of configuration transformation and automatic combination.
变胞机构是1998年提出的一种可高度展开、折叠的机构，该机构具有构态变换和自动组合等特点，能在不同的状态下改变机构有效杆件的数目从而提供不同的自由度数，自动组合出新的机构，以适应不同的功能需要。
Modeling and analysis of cluster tool with revisiting in semiconductor manufacturing;
半导体重入加工过程自动组合装置的建模与分析
It is developed to model the cluster tools in semiconductor manufacturing.
将面向资源的着色、赋时Petri网(coloredtimedresource orientedPetrinet,CTROPN)用于半导体制造业中自动组合装置的建模。
In order to realize automatic applications of Manufacturing Grid(MG),a framework along with its algorithms for automatic service composition,were proposed based on domain-specified ontology.
为实现制造网格应用的自动化,提出了一个基于领域本体(ontology)的服务自动组合体系结构及其相应的算法。
Cluster tools are the critical equipment for semiconductor manufacture,and usually,the bottleneck equipment.
半导体制造中的自动组合装置是半导体制造的关键设备和瓶颈设备。
The manufacture process involves the participation of over hundred procedures and many key equipment, which includes so-called cluster tools.
制造过程中需要牵涉到上百道工序和许多关键核心设备,其中就包括了自动组合装置。