After low temperature baking,a perfect arch sacrificial layer of bridges with a ratio higher than 60% is obtained.
该方法利用不同性质的光刻进行多层甩胶、低温烘烤牺牲层,制出弧度很好的桥区拱形牺牲层,经低温烘烤的牺牲层的高度比烘烤前的高出60%。
