Two kinds of sensors were designed: silicon membrane wind speed and direction sensor,and silicon cantilever wind speed and direction sensor.
设计了两种基于MEMS工艺的固态测风传感器,即硅薄膜式测风传感器和硅悬梁式测风传感器,用流体力学原理对这两种风速风向传感器进行了理论分析及ANSYS CFD软件模拟仿真,得出了风速与挠度、剪切力的关系。
Two kinds of sensors were designed:silicon membrane wind speed and direction sensor,and silicon cantilever wind speed and direction sensor.
设计了两种基于 MEMS 工艺的固态测风传感器,即硅薄膜式测风传感器和硅悬梁式测风传感器,用流体力学原理对这两种风速风向传感器进行了理论分析及 ANSYS CFD 软件模拟仿真,得出了风速与挠度、剪切力的关系。