The Key Craftwork and Technique of Assembling and Adjusting of Projective Lens of Stepper;
投影光刻机镜头的装校关键工艺与技术
Soft X-ray projection lithography technology;
软X射线投影光刻技术及其发展
Design of diffractive optical elements for off-axis illumination in projection lithography;
投影光刻离轴照明用衍射光学元件设计
Soft X-ray projection lithography is expected as a candidate for VLSI p roduction in the near future.
软 X射线投影光刻作为特征线宽小于 0 。
Two-mirror system design study of reduced projection optics for EUV Lithography;
极紫外投影光刻两镜微缩投影系统的光学设计
The research results show that IIL can get the high resolution more effectively than conventional optical lithography (OL).
研究结果表明，掩模投影成像干涉光刻技术比传统投影光刻能够得到更高的光刻分辨率。
Investigation on Extreme Ultraviolet Lithography;
极紫外投影光刻中若干关键技术研究
Design and Analysis of an Alignment System for the Large-area Scan-and-repeat Projection Lithography
大面积循环扫描投影光刻对准系统设计和分析
Her eyes flashed to her daughter.
她的眼光立刻投向女儿。
Thermal Deformation of EUV Mask and its Influence on Lithographic Performance;
极紫外光刻掩模热变形及其对光刻性能的影响
Schmidt projection optics
施密特光学投影系统
reduction aligner
收缩式投影曝光装置
one to one projection system
一比一投影曝光装置
CRT-photo chromatic film projectio
光变色膜显像管投影
projection stepper
步进式投影曝光装置
electron beam projection exposure apparatus
电子束投影曝光装置
optical orthophotoscope
光学正射投影纠正仪
optical-mechanical projection system
光学－机械投影系统
optical piding head with projection readout
光学投影读数分度头
optidress projector scope
光学修正投影显示器
cool beam low volatage electronic projective lamp
冷光束低压电子投影灯
ozone induced scumming
臭氧感生未显影光刻胶形成