Based on super\|resolution theory, the 3\|D confocal surface profilometry and annular pupil filter are combined for analyzing the property of the 3\|D profilometry.
通过对共焦三维形貌检测术的分析 ,根据超分辨理论 ,在共焦系统中加入环形光瞳滤波器 ,以期延长系统的动态检测范围 ,并提高系统的横向分辨率。
