1.In the other embodiment, the susceptor cross section is a polygon with a plurality of substrates mounted on its facets.
在另一个实施方式中,衬托器截面是多边形,且多个衬底安装在衬托器的面上。
2.A flexible substrates is mounted on the cylindrical susceptor.
挠性衬底安装在圆柱形衬托器上。