同义词
1)flood exposure,整片曝光2)full field exposure,整片曝光3)full wafer exposure,整片曝光4)whole wafer exposure,整片曝光5)Compensating gauge,调整片6)full slice integration,整片集成7)full slice technology,整片工艺8)full wafer alignment,整片对准9)full wafer chip,整片管芯10)full wafer lithography,整片光刻
